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FT-MP02是一款集微纳力学测试、微纳机械性能测试、电学测试于一身的微机器人系统。高分辨力传感探针配合高精度三维移动台以及高精度电学测试系统能直接且同时精确测得5nN~100mN范围内的微力、1nm~60mm范围内的微位移、3nA~50mA电流或1mV~300V范围内电压信号。8英寸机台设计使得FT-MPS02不仅适合于科研领域的MEMS研究工作,也非常适合于工业领域对于Wafer量级的MEMS的微纳力学及电学测试。


FT-MPS02微纳力学-电学测试系统

微力及微位移-电学原位同步测试




                                                                                                                                                                                                                                                                         



Wafer量级的MEMS力学-电学同步测试

8英寸样品台、力传感探针 & 电传感探针、三维移动台(1nm~60mm)、内置半导体参数分析仪





                                                                                                                                                                                                                                                                        



FT-S传感探针、电传感探针,超高精度且量程丰富

5nN~100mN力学测试、3nA~50mA电流测试、1mV~300V电压测试





                                                                                                                                                                                                                                                                        



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